200 mm electron beam lithography tool

A Contract Award Notice
by CARDIFF UNIVERSITY

Source
OJEU
Type
Contract (Supply)
Duration
0.5 year (est.)
Value
£2M
Sector
INDUSTRIAL
Published
18 Jan 2022
Delivery
To 19 Jul 2022 (est.)
Deadline
n/a

Concepts

Location

Cardiff

Geochart for 2 buyers and 1 suppliers

2 buyers

1 supplier

Description

The aim of this procurement process is to procure a tool that will expand our capability by including the capability of processing larger wafers up to 200mm in diameter.

Award Detail

1 Raith (Dortmund)
  • Reference: cu.787.th
  • Num offers: 1
  • Value: £1,914,530
  • Contractor is an SME.

Award Criteria

Quality 80.0
PRICE 20.0

CPV Codes

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

Indicators

  • Award on basis of price and quality.

Other Information

(WA Ref:117538)

Reference

Domains