Provision of a 200mm Wafer Capable Rapid Thermal Anneal (RTA) Tool

Concepts

• southampton
• precision equipment
• tool
• rapid thermal anneal
• rta
• 200mm wafers
• 200mm wafer
• provision of a 200mm wafer capable rapid thermal anneal
• zepler institute nanofabrication facility
• zepler institute nanofabrication facility cleanroom

Location

Description

The Zepler Institute Nanofabrication Facility cleanroom has identified a need to procure a RTA (Rapid Thermal Anneal) tool that is capable of processing 200mm wafers under a hydrogen ambient. This tool will support future research in the Nanofabrication Cleanroom Facility and in particular the strategic area of Silicon photonics. The acquisition of this equipment will support the facility's transition towards being fully 200mm wafer capable. The system must be delivered, commissioned and successfully pass user acceptance testing as per the requirements set out in Appendix 1(Specification) of this File 2 (Invitation to Tender) Document. A warranty with a minimum period of 12 months (including parts, labour and onsite engineer visits) must be included as part of the proposal. Onsite commissioning, user acceptance testing, user training and any associated costs must be detailed as part of the proposal, additional costs should be included for information purposes only in the commercial requirements response document. Shipping / delivery of the equipment to the University must be DDP incoterm (Inc Delivery, Duty, Insurance and VAT).

Award Detail

CPV Codes

• 38000000 - Laboratory, optical and precision equipments (excl. glasses)

Indicators

• Contract is suitable for SMEs.

Other Information

The University is utilising an electronic tendering tool, In-Tend(https://intendhost.co.uk/ universityofsouthampton) to manage this procurement and to communicate with tenderers (as appropriate). All documentation in relation to this tender can be downloaded from In-Tend. Tenderers are advised that there will be no hard copy documents issued and all communications with the University, including the submission of Selection Stage and/or Invitation to Tender responses will be conducted via In-Tend. Regular monitoring of the portal is the responsibility of the tenderer. If you are not already registered as a supplier with the University of Southampton, you will need to register in In-Tend in order to access the procurement documentation. Once you have logged in as a supplier: click on 'Tenders'; locate the relevant project; and click 'View Details'. Once you are in the project screen, you will be able to register your organisation against the project and access all documentation by clicking 'Express Interest'. Tenderers are advised that formal expressions of interest in the project must be by way of completion and return of the relevant documents via In-Tend. Further instructions for the submission of responses are below: To submit your return: 1. Log in 2. Click 'Tenders' 3. Locate the relevant project 4. View details 5. Click on the tab relating to the relevant project stage (e.g. 'Invitation to Tender'). 6. Click on the 'Attach Documents' button and upload your return. 7. Check ALL your response documents are uploaded and displayed in the Tender Return' panel. The system will only permit your organisation to make one return. 8. Click the red 'Submit Return' button. Please note, to preserve the integrity of the procurement, all communications with the University must be made via the correspondence function within In-Tend. Publication of Award Details: In accordance with Regulation 50, paragraph (2) of the Public Contracts Regulations 2015 and subject to Article 5 and Annex 5, Part D (13) of Directive 2014/24/EU of the European Parliament and of the Council (if applicable),the University intends to publish the value of any resulting contract at the award stage, and reserves the right to do so. By submitting a response, tenderers are consenting to publication of this information unless otherwise agreed in advance with the University. Tenderers are solely responsible for their costs and expenses incurred in connection with the preparation and submission of responses and participation in this and all future stages of this procurement. Under no circumstances will the University be liable for any costs or expenses borne by potential suppliers/tenderers or any of their supply chain, partners or advisers in this procurement process.