Cleanroom 3D Measurement Microscopy System

A Tender Notice
by NATIONAL PHYSICAL LABORATORY

Source
Contracts Finder
Type
Contract (Products)
Duration
5.5 month
Value
___
Sector
INDUSTRIAL
Published
14 Jan 2022
Delivery
22 Mar 2022 to 31 Aug 2022
Deadline
14 Feb 2022 12:00

Concepts

Location

Geochart for 1 buyers and 0 suppliers

1 buyer

Description

NPL wishes to procure a microscopy system with at least 1μm resolution for the automated dimensional metrology of 3D structures, wafers and wafer-scale devices. Automating the measurements of the device under test (DUT) will require homing in on recognisable features for positioning under the microscope for optical scanning of 3D geometries as well as repeated localised contactless surface roughness measurements. This will require 3D linear translation and rotation of the DUT. The system must be suitable for use in ISO 7 cleanrooms.

CPV Codes

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

Indicators

  • Contract is suitable for SMEs.

Other Information

Participation is via the London Universities eSourcing Portal. Participants must provide qualification information. The procurement documents are available online https://lupc.bravosolution.co.uk/web/login.shtml

Reference

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