Direct write optical lithography system

A Contract Award Notice
by CARDIFF UNIVERSITY

Source
OJEU
Type
Contract (Supply)
Duration
0.5 year (est.)
Value
£370K
Sector
INDUSTRIAL
Published
25 Feb 2022
Delivery
To 26 Aug 2022 (est.)
Deadline
n/a

Concepts

Location

Cardiff

Geochart for 2 buyers and 1 suppliers

2 buyers

1 supplier

Description

The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a 200mm direct write optical lithography system.

Award Detail

1 Heidelberg Instruments Mikrotechnik (Heidelberg)
  • Reference: cu.803.th
  • Num offers: 1
  • Value: £370,120
  • Contractor is an SME.

Award Criteria

quality 80.0
PRICE 20.0

CPV Codes

  • 42671100 - Laboratory tool carriers

Indicators

  • Award on basis of price and quality.

Other Information

(WA Ref:118897)

Reference

Domains