Photolithography Cluster

A Contract Award Notice
by CARDIFF UNIVERSITY

Source
OJEU
Type
Contract (Supply)
Duration
1 year (est.)
Value
£339K
Sector
INDUSTRIAL
Published
04 Mar 2022
Delivery
To 04 Mar 2023 (est.)
Deadline
n/a

Concepts

Location

Cardiff

Geochart for 2 buyers and 3 suppliers

2 buyers

1 supplier

Description

The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media. This tender is separated into 3 lots that will be referred to as: - Lot 1: Spin, bake & prime - Lot 2: Developer (TMAH) - Lot 3: Developer (Solvent)

Lot Division

1 Spin, bake & prime

Spin, bake and prime tool
2 Developer (TMAH)

The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc).
3 Developer (Solvent)

The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc).

Award Detail

1 Inseto (Andover)
  • Spin, bake & prime
  • Num offers: 5
  • Value: £151,780
  • Contractor is an SME.
2 Inseto (Andover)
  • Developer (TMAH)
  • Num offers: 5
  • Value: £79,451
  • Contractor is an SME.
3 Inseto (Andover)
  • Developer (Solvent)
  • Num offers: 5
  • Value: £108,121
  • Contractor is an SME.

Award Criteria

quality 80.0
PRICE 20.0

CPV Codes

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

Indicators

  • Award on basis of price and quality.

Other Information

(WA Ref:119171)

Reference

Domains