QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information

A Prior Information Notice
by QUEEN'S UNIVERSITY BELFAST

Source
Find a Tender
Type
Contract (Goods)
Duration
not specified
Value
___
Sector
INDUSTRIAL
Published
24 Aug 2022
Delivery
not specified
Deadline
n/a

Concepts

Location

Geochart for 1 buyers and 0 suppliers

1 buyer

Description

Queen’s University Belfast ("Queen’s") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen’s. At present we have a technical requirement for an instrument that includes;- 1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2. A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3. A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4. An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity. - 5. A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers.

Total Quantity or Scope

Please refer to the Published RFI Documentation

CPV Codes

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

Other Information

** PREVIEW NOTICE, please check Find a Tender for full details. **

Reference

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