Provision of a 200mm Spectroscopic Ellipsometer

Concepts

• southampton
• measuring instruments
• mm spectroscopic ellipsometer
• spectroscopic ellipsometery
• spectroscopic ellipsometer
• southampton nanofabrication centre
• estimated value of the contract
• maximum contract period
• snc
• important factors

Location

Description

The SNC (Southampton Nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition, and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement. Procurement Process: The University is conducting this procurement using the Open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods described in the Specification. Contract Period: The University proposes to enter into a Contract for one year and six months - this will be the maximum contract period. This will comprise of an initial contract period of six months for the provision of the equipment with an additional twelve months warranty period for support and maintenance. The contract will be effective on signing. The term of the warranty of twelve months will run from the date of acceptance of the equipment. Contract Value: The estimated value of the contract is £250,000.00 excluding VAT. This value includes all related components, services and maintenance for the contract period.

CPV Codes

• 38300000 - Measuring instruments

Indicators

• Contract is suitable for SMEs.