Provision of a 200mm Spectroscopic Ellipsometer

A Tender Notice
by UNIVERSITY OF SOUTHAMPTON

Source
Find a Tender
Type
Contract (Goods)
Duration
1.5 year
Value
£250K
Sector
INDUSTRIAL
Published
14 Jul 2023
Delivery
To 05 Feb 2025 (est.)
Deadline
15 Aug 2023 11:00

Concepts

Location

Southampton, Hampshire, UK

Geochart for 1 buyers and 0 suppliers

1 buyer

Description

The SNC (Southampton Nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition, and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement.

Total Quantity or Scope

The SNC (Southampton Nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition, and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement. The University is conducting this procurement using the Open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods described in the Specification. The University proposes to enter into a Contract for one year and six months - this will be the maximum contract period. This will comprise of an initial contract period of six months for the provision of the equipment with an additional twelve months warranty period for support and maintenance. The contract will be effective on signing. The term of the warranty of twelve months will run from the date of acceptance of the equipment. The estimated value of the contract is £250,000.00 excluding VAT. This value includes all related components, services and maintenance for the contract period. Additional information: Lots: This contract is NOT suitable for splitting into lots. The risk of dividing the requirement into Lots would render the execution of the contract excessively technically difficult, not cost effective and would undermine proper execution of the contract.

Award Criteria

Mandatory Technical Pass / Fail
Desirable Technical - Overall 80%
Desirable Technical - Section 2: Compliance with the Installation requirements of the specification : 7.50%
Desirable Technical - Section 3: Compliance with the Optical Sources and Detectors requirements of the specification 19.30%
Desirable Technical - Section 4: Compliance with the Measurement hardware requirements of the specification 21.90%
Desirable Technical - Section 5: Compliance with the Measurement requirements of the specification 16.10%
Desirable Technical - Section 6: Compliance with the Data Analysis and Fitting requirements of the specification 7.50%
Desirable Technical - Section 7: Compliance with the Future Proofing requirements of the specification 7.70%
Cost criterion 20%

CPV Codes

  • 38300000 - Measuring instruments

Indicators

  • This is a one-off contract (no recurrence)
  • Renewals are not available.
  • Financial restrictions apply.
  • Technical restrictions apply.

Other Information

** PREVIEW NOTICE, please check Find a Tender for full details. ** E-Tendering Portal: The University is utilising an electronic tendering tool, In-Tend (https://intendhost.co.uk/ universityofsouthampton) to manage this procurement and to communicate with potential suppliers and/or tenderers (as appropriate). All documentation in relation to this tender can be downloaded from In-Tend. Potential suppliers/tenderers are advised that there will be no hard copy documents issued and all communications with the University, including the submission of Selection Stage and/or Invitation to Tender responses will be conducted via In-Tend. Regular monitoring of the portal is the responsibility of the potential supplier/tenderer. If you are not already registered as a supplier with the University of Southampton, you will need to register in In-Tend in order to access the procurement documentation. Once you have logged in as a supplier: click on 'Tenders'; locate the relevant project; and click 'View Details'. Once you are in the project screen, you will be able to register your organisation against the project and access all documentation by clicking 'Express Interest'. Potential suppliers/tenderers are advised that formal expressions of interest in the project must be by way of completion and return of the relevant documents via In-Tend. Further instructions for the submission of responses are below: To submit your return: 1. Log in 2. Click 'Tenders' 3. Locate the relevant project 4. View details 5. Click on the tab relating to the relevant project stage (e.g. 'Invitation to Tender') 6. Click on the 'Attach Documents' button and upload your return. 7. Check ALL your response documents are uploaded and displayed in the 'My Tender Return' panel. The system will only permit your organisation to make one return. 8. Click the red 'Submit Return' button. Please note, to preserve the integrity of the procurement, all communications with the University must be made via the correspondence function within In-Tend. Publication of Award Details: In accordance with Regulation 50, paragraph (2) of the Public Contracts Regulations 2015 and subject to Article 5 and Annex 5, Part D (13) of Directive 2014/24/EU of the European Parliament and of the Council (if applicable), the University intends to publish the value of any resulting contract at the award stage, and reserves the right to do so. By submitting a response, potential suppliers/tenderers are consenting to publication of this information unless otherwise agreed in advance with the University. Costs and Expenses: Potential suppliers/tenderers are solely responsible for their costs and expenses incurred in connection with the preparation and submission of responses and participation in this and all future stages of this procurement. Under no circumstances will the University be liable for any costs or expenses borne by potential suppliers/tenderers or any of their supply chain, partners or advisers in this procurement process. The University is not liable for any costs in the event of the cancellation of this procurement process.

Reference

Domains