PECVD Plasma Deposition Tool

A Contract Award Notice
by CARDIFF UNIVERSITY

Source
OJEU
Type
Contract (Supply)
Duration
0.5 year (est.)
Value
£260K
Sector
INDUSTRIAL
Published
01 Apr 2022
Delivery
To 30 Sep 2022 (est.)
Deadline
n/a

Concepts

Location

Cardiff

Geochart for 2 buyers and 1 suppliers

2 buyers

1 supplier

Description

A new PECVD plasma deposition tool for use within the ICS cleanroom to deposit films of dielectric materials onto semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers.

Total Quantity or Scope

The requirement of the tool is to deposit films of dielectric materials onto semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers.

Award Detail

1 Oxford Instruments (Abingdon)
  • Reference: cu.773.th
  • Num offers: 1
  • Value: £259,975
  • Contractor is an SME.

Award Criteria

Quality 70.0
PRICE 30.0

CPV Codes

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

Indicators

  • Award on basis of price and quality.

Other Information

(WA Ref:120061)

Reference

Domains