Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots

Concepts

• sheffield
• precision equipment
• device fabrication small research facility
• reactive ion etcher
• coupled plasma reactive ion etcher
• rie
• purchase of a reactive ion etcher
• reactive ion etchers
• plasma
• device fabrication

Location

The Department of Electronic and Electrical Engineering at the University of Sheffield

Description

The Device Fabrication Small Research Facility (SRF) currently has one reactive ion etcher (RIE) and two inductively coupled plasma reactive ion etchers (ICPRIE), serving a wide range of research and industrial customers from across the University and nationally. The SRF is capable of manufacturing semiconductor devices via a range of standard processes, working alongside our Epitaxy facility growing advanced semiconductor materials. Our research portfolio in these areas is in excess of £50million. Quotations are required for 1 off of each RIE and ICP, in two separate lots, with the specifications detailed within the tender document. As present the likelihood is that only one item will be purchased, hence the title of this exercise being on an and/or basis.

Total Quantity or Scope

The RIE and ICP equipment is fundamental to device fabrication, and we are planning to expand our capacity to meet increasing demand and to improve customer service. The anticipated budget for each item is: RIE £300,000 (excluding VAT) ICPRIE £233,333 (excluding VAT)

Renewal Options

As described within the tender documents

CPV Codes

• 38000000 - Laboratory, optical and precision equipments (excl. glasses)
• 42000000 - Industrial machinery

Indicators

• Bids should cover the whole contract.
• Options are available.
• Renewals are not available.
• Award on basis of price and quality.

Other Information

This tender is designed to seek response for the purchase of a Reactive Ion Etcher (RIE) or, a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) and it is highly unlikely that we will be in a position to purchase both items.