Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots

Concepts

• sheffield
• precision equipment
• device fabrication small research facility
• reactive ion etcher
• inductively coupled plasma reactive ion etcher
• rie
• purchase of a reactive ion etcher
• reactive ion etchers
• plasma
• device fabrication

Location

The Department of Electronic and Electrical Engineering at the University of Sheffield

Description

The Device Fabrication Small Research Facility (SRF) currently has one reactive ion etcher (RIE) and two inductively coupled plasma reactive ion etchers (ICPRIE), serving a wide range of research and industrial customers from across the University and nationally. The SRF is capable of manufacturing semiconductor devices via a range of standard processes, working alongside our Epitaxy facility growing advanced semiconductor materials. Our research portfolio in these areas is in excess of £50million. The RIE and ICP equipment is fundamental to device fabrication, and we are planning to expand our capacity to meet increasing demand and to improve customer service. Quotations are required for 1 off of each RIE and ICP, in two separate lots, with the specifications detailed within the tender document. At present the likelihood is that only one item will be purchased, hence the title of this exercise being on an and/or basis.

Total Quantity or Scope

Suppliers should include all costs associated with a 'turn key' solution, i.e., supply, delivery, installation, commissioning, process verification and training, including all import duties, etc. Where possible training for technical staff in preventative maintenance operations should be included. Suppliers should consider adding value to their quotations, e.g. through extended warranties and service contracts The indicative budget for each item is: RIE £500,000 (excluding VAT) ICPRIE £560,000 (excluding VAT) Additional information: This tender is designed to seek response for the purchase of a Reactive Ion Etcher (RIE) or, a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) and it is highly unlikely that we will be in a position to purchase both items.

Renewal Options

As described within the tender documents

CPV Codes

• 38000000 - Laboratory, optical and precision equipments (excl. glasses)
• 42000000 - Industrial machinery

Indicators

• Variant bids may be considered.
• This is a one-off contract (no recurrence)
• Options are available.
• Renewals are not available.

Other Information

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