Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots

Concepts

• sheffield
• precision equipment
• device fabrication small research facility
• reactive ion etcher
• inductively coupled plasma reactive ion etcher
• rie
• reactive ion etchers
• plasma
• device fabrication
• small research facility

Location

SHEFFIELD

Description

The Device Fabrication Small Research Facility (SRF) currently has one reactive ion etcher (RIE) and two inductively coupled plasma reactive ion etchers (ICPRIE), serving a wide range of research and industrial customers from across the University and nationally. The SRF is capable of manufacturing semiconductor devices via a range of standard processes, working alongside our Epitaxy facility growing advanced semiconductor materials. Our research portfolio in these areas is in excess of £50million. The RIE and ICP equipment is fundamental to device fabrication, and we are planning to expand our capacity to meet increasing demand and to improve customer service. Quotations are required for 1 off of each RIE and ICP, in two separate lots, with the specifications detailed within the tender document. At present the likelihood is that only one item will be purchased, hence the title of this exercise being on an and/or basis.

Ammendments to Previous Notice

CPV Codes

• 38000000 - Laboratory, optical and precision equipments (excl. glasses)